Aera TC FC-D980C Mass Flow Controller HBR 183.23 SCCM w/ CA-98D9-Z Adapter Used Part No: BP102047-00

Part No: BP102047-00

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Part No: 23873-01

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Part No: 0052196-008 Rev AB

Aera TC FC-D980C Mass Flow Controller HBR 183.23 SCCM w/ CA-98D9-Z Adapter Used Part No: BP102047-00Aera TC FC D980C Mass Flow Controller HBR 183. 23 SCCM w CA 98D9 Z Adapter used working Inventory # AA 3201 This Aera TC FC D980C mass flow controller with adapter is used working surplus. The physical condition is good, but there are some signs of previous use and handling. This item will be removed from the main body of a Hitachi M 511E system. Specifications MFC Part No: TC FC D980C Adapter Part No: CA 98D9 Z Gas: HBR Range: 183. 23 SCCM Fitting: